Calibration of piezoelectric three-dimensional force sensor considering angle deviation

Table 1. Angle deviation measurement
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Table 1. Angle deviation measurement
Deviation Angle
x +0.008 7
y -0.007 0
z +0.003 8
θ_xy 0
θ_xz +0.008 7
θ_yx -0.002 3
θ_yz +0.015 0
θ_zx -0.002 6
θ_zy -0.005 2

Table 2. X-directional load output data

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Table 2. X-directional load output data

Load/N	X/mV	Y/mV	Z/mV
300	-315.86	-5.78	5.49
600	-628.69	-13.64	14.24
900	-942.93	-18.05	24.07
1 200	-1 256.50	-23.05	34.60
1 500	-1 568.16	-28.28	45.72
1 800	-1 880.08	-33.32	56.58
2 100	-2 193.72	-38.95	67.24
2 400	-2 507.73	-44.52	76.88

Table 3. Y-directional load output data
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Table 3. Y-directional load output data
Load/N X/mV Y/mV Z/mV
300 0.44 -309.00 -2.75
600 2.52 -617.17 5.75
900 4.23 -924.86 10.57
1 200 5.44 -1 233.40 6.85
1 500 5.92 -1 539.61 2.79
1 800 7.71 -1 846.67 0.79
2 100 8.75 -2 154.36 -0.02
2 400 8.85 -2 463.11 -2.72

Table 4. Z-directional load output data

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Table 4. Z-directional load output data

Load/N	X/mV	Y/mV	Z/mV
1 500	-23.57	-6.75	-1 414.92
3 000	-45.01	-20.47	-2 832.30
4 500	-58.29	-25.03	-4 242.38
6 000	-65.26	-25.96	-5 650.50
7 500	-74.23	-26.50	-7 062.47
9 000	-81.68	-27.28	-8 461.86
10 500	-88.18	-27.63	-9 872.06
12 000	-96.05	-24.78	-11 277.35

Table 5. Comparison of coupling coefficients
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Table 5. Comparison of coupling coefficients
Method k_yx k_zx k_xy k_zy k_xz k_yz
Old model 0.004 0 -0.006 4 -0.017 8 -0.001 3 0.034 7 -0.002 5
New model 0.000 1 -0.006 6 -0.016 9 0.004 30 0.036 0 0.005 2

Table 6. Comparison of main direction coefficients
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Table 6. Comparison of main direction coefficients
Method k_xx k_yy k_zz
Old model -1.043 3 -1.025 3 -0.938 9
New model -1.044 9 -1.026 4 -0.941 1

Table 7. Decoupling error mean reduction ratio
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Table 7. Decoupling error mean reduction ratio
Direction X load Y load Z load
X output 79 0 78
Y output 81 80 80
Z output 80 81 81

Table 8. Decoupling error peak reduction ratio
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Table 8. Decoupling error peak reduction ratio
Direction X load Y load Z load
X output 49 0 40
Y output 20 43 40
Z output 39 25 49

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Jun ZHANG, Yuhe WANG, Zongjin REN, Wenju SUN, Jiale CAI. Calibration of piezoelectric three-dimensional force sensor considering angle deviation[J]. Optics and Precision Engineering, 2023, 31(17): 2546

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