Optics and Precision Engineering, Volume. 32, Issue 11, 1639(2024)

Calibration and correction of geometric errors in laser tracker

Shan WANG1...2,*, Zili ZHANG1,2,*, Dengfeng DONG1,2, Weihu ZHOU1,2, Rongyi JI1, Yingling PAN1,2, Guoming WANG1,2 and Chengjun CUI1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing00029, China
  • 2University of Chinese Academy of Sciences, Beijing100049, China
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    Figures & Tables(23)
    Coordinate measurement principle for laser tracker
    Transit offset error model
    Model of transit tilt error
    Laser transit and tilt error model
    Eccentricity error model for test rod mounting
    Position of telecentric measurement system
    Images of central axis of test rods
    Trajectory of central axis of test rods
    Images of central axis of test rods
    Transit offset error calibration model
    Images of central axis of test rods
    Transit tilt error calibration model
    Laser offset and tilt error calibration
    Laset offset and tilt error calibration model
    Experimental setup of transit offset error
    Central axis offset of test rods
    Measurement data and curve fitting of telecentric measurement system
    Experimental setup of laser offset and tilt error calibration
    PSD calibration
    Length measurement test
    Scale bar test positions
    Measurement errors before and after compensation of geometric error
    • Table 1. Coordinates of spot on PSD and distances between two spots

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      Table 1. Coordinates of spot on PSD and distances between two spots

      方位位置A位置B
      xaiyaiD1ixbiybiD2i
      正镜-0.0000.0010.4320.0000.0070.488
      倒镜-0.429-0.054-0.4820.077
      正镜-0.0020.0010.441-0.0100.0020.508
      倒镜-0.441-0.051-0.5140.065
      正镜0.004-0.0020.424-0.0010.0040.584
      倒镜-0.418-0.045-0.5800.082
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    Shan WANG, Zili ZHANG, Dengfeng DONG, Weihu ZHOU, Rongyi JI, Yingling PAN, Guoming WANG, Chengjun CUI. Calibration and correction of geometric errors in laser tracker[J]. Optics and Precision Engineering, 2024, 32(11): 1639

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    Paper Information

    Category:

    Received: Feb. 7, 2024

    Accepted: --

    Published Online: Aug. 8, 2024

    The Author Email: WANG Shan (wangshan@ime.ac.cn), ZHANG Zili (zhangzili@ime.ac.cn)

    DOI:10.37188/OPE.20243211.1639

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