Optics and Precision Engineering, Volume. 32, Issue 11, 1639(2024)

Calibration and correction of geometric errors in laser tracker

Shan WANG1,2、*, Zili ZHANG1,2、*, Dengfeng DONG1,2, Weihu ZHOU1,2, Rongyi JI1, Yingling PAN1,2, Guoming WANG1,2, and Chengjun CUI1
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences, Beijing00029, China
  • 2University of Chinese Academy of Sciences, Beijing100049, China
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    To enhance the coordinate measurement accuracy of laser trackers, we analyzed the geometric errors of the device and studied calibration and correction methods for transit offset error, transit tilt error, laser offset error, and laser tilt error. First, geometric error models were established using geometric analysis methods. A calibration device for geometric error parameters was constructed based on a telecentric measurement system, test rods and a PSD device. This setup allows for rapid, automatic high-precision calibration and compensation of geometric errors. Subsequently, the geometric errors measured by the calibration experiment were incorporated into the error compensation models, and the scale bar length measured by the laser tracker was compared with its standard length. Experimental results indicate that after geometric error correction, the coordinate measurement error of the laser tracker can be reduced from 13 μm/m to less than 4 μm/m, improving measurement accuracy by approximately 9 μm/m. These findings confirm the validity of the geometric error calibration and correction methods, demonstrating that coordinate measurement accuracy of laser trackers can be significantly enhanced using these methods.

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    Shan WANG, Zili ZHANG, Dengfeng DONG, Weihu ZHOU, Rongyi JI, Yingling PAN, Guoming WANG, Chengjun CUI. Calibration and correction of geometric errors in laser tracker[J]. Optics and Precision Engineering, 2024, 32(11): 1639

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    Paper Information

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    Received: Feb. 7, 2024

    Accepted: --

    Published Online: Aug. 8, 2024

    The Author Email: WANG Shan (wangshan@ime.ac.cn), ZHANG Zili (zhangzili@ime.ac.cn)

    DOI:10.37188/OPE.20243211.1639

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