Researching | Research on digital calibration of dual-grating interferometric spacing based on ICEEMDAN-HT

[1] Y F YIN, Z W LIU, S JIANG et al. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving. Optics and Lasers in Engineering, 158, 107167(2022).

[2] Lihua LEI, Yujie ZHANG, Yunxia FU. Displacement measurement error of grating interferometer based on vector diffraction theory. Infrared and Laser Engineering, 53, 20230536(2024).

[3] Xiaoyao CHU, Yaoqiong SHEN, Liqin LIU et al. Research on fine characterization technology of key parameters of linewidth of Si/SiO₂ multilayer film. Infrared and Laser Engineering, 53, 20230475(2024).

[4] P C HU, D CHANG, J B TAN et al. Displacement measuring grating interferometer: a review. Frontiers of Information Technology Electronic Engineering, 20, 1800708(2019).

[5] H DU, W T ZHANG, X M XIONG et al. Influence of installation error of grating interferometer on high-precision displacement measurement. Optical Engineering, 60, 045102(2021).

[6] [6] LIU Yusheng. Fabrication of linear diffraction grating interferometer system with high accuracy [D]. Hefei: Hefei University of Technology, 2006. (in Chinese)

[7] Jun YANG, Jianheng HUANG, Yaohu LEI et al. Analysis of period and visibility of dual phase grating interferometer. Chinese Physics B, 31, 861-867(2022).

[8] W T ZHANG, Y L WANG, H DU et al. High-precision displacement measurement model for the grating interferometer system. Optical Engineering, 59, 045101(2020).

[9] W B WU, X J YUAN. Analyzing spectral peak distribution of coupled signals using Fourier transform theory. Indian Journal of Physics, 97, 4509-4519(2023).

[10] Z H YANG, G R YANG, L H YANG et al. A reconstruction method for graph signals based on the power spectral density estimation. Digital Signal Processing, 122, 103347(2022).

[11] S AMIN. Implementation of hilbert transform based high-resolution phase unwrapping method for displacement retrieval using laser self mixing interferometry sensor. Optics and Laser Technology, 149, 107887(2022).

[12] E ARRUFATPIÉ, M ESTÉVEZBÁEZ, J M ESTÉVEZCARRERAS et al. Comparison between traditional fast Fourier transform and marginal spectra using the Hilbert–Huang transform method for the broadband spectral analysis of the electroencephalogram in healthy humans. Engineering Reports, 3, 12367(2021).

[13] N E HUANG, S ZHENG, S R LONG et al. The empirical mode decomposition and hilbert spectrum for nonlinear and non-stationary time series analysis. Proceedings of the Royal Society, 454, 903-995(1998).

[14] W DENG, Z G LIU, Z W DENG et al. Extraction of interference phase in frequency-scanning interferometry based on empirical mode decomposition and Hilbert transform. Applied Optics, 57, 2299-2305(2018).

[15] Keyuan YANG, Zhongwen DENG, Wenjun CHEN et al. Phase-extracting method of optical frequency scanning interference signals based on the CEEMD-HT algorithm. Chinese Optics, 16, 682-700(2023).

[16] Q LV, Z W LIU, W WANG et al. Fast method to detect and calculate displacement errors in a Littrow grating-based interferometer. Applied Optics, 58, 3193-3199(2019).

[17] [17] FENG Lina. Displacement measurement of laser selfmixing grating interferometer based on Littrow structure signal processing [D]. Harbin: The Ntheast Petroleum University, 2022. (in Chinese)

[18] Z LI, Y C CUI, Y K GU et al. Temperature drift compensation for Four-Mass vibration MEMS gyroscope based on EMD and hybrid filtering fusion method. Micromachines, 14, 14050971(2023).

[19] Z H WU, N E HUANG. Ensemble empirical mode decomposition: a noise-assisted data analysis method. Advances in Adaptive Data Analysis, 1, 207152935(2011).

[20] M H XIAO, Z Y WANG, Y F ZHAO et al. A new fault feature extraction method of rolling bearings based on the improved self-selection ICEEMDAN-permutation entropy. ISA Transactions, 143, 536-547(2023).

[21] Zhen HUA, Bingkun GAO, Hangyu YUE et al. Vibration measurement based on square arithmetic and multiple Hilbert transform for F-P interferometry. Laser & Infrared, 51, 1065-1069(2021).

[22] Xiao DENG, Tongbao LI, Xinbin CHENG. Self-traceable grating reference material and application. Optics and Precision Engineering, 30, 2608-2625(2022).