Infrared and Laser Engineering, Volume. 53, Issue 12, 20240367(2024)
Research on digital calibration of dual-grating interferometric spacing based on ICEEMDAN-HT
Figures & Tables(12)
Fig. 1. Homodyne interference measurement system of dual-grating for spacing calibration
Fig. 3. (a) Original sinusoidal periodic signal; (b) Noisy sinusoidal periodic signal with non-uniform random noise
Fig. 4. (a) Decomposition plots for EMD components; (b) Decomposition plots for CEEMD components; (c) Decomposition plots for ICEEMDAN components
Fig. 5. (a) Quantitative comparison chart of mean square error of each component; (b) Quantitative comparison chart of signal-to-noise of ratio each component; (c) Quantitative comparison chart of person correlation coefficient of each component
Fig. 6. (a) EMD reconstructed signal comparison and detail enlargement; (b) CEEMD reconstructed signal comparison and detail enlargement; (c) ICEEMDAN reconstructed signal comparison and detail enlargement
Fig. 7. Homodyne interference measurement system of dual-grating for spacing calibration
Fig. 8. (a) Diagram of dual grating initial interference signal and Hilbert transform phase unwrapping; (b) EMD-HT; (c) CEEMD-HT; (d) ICEEMDAN-HT
Table 1. Comparative evaluation of reconstruction signals and original signals using three methods
View tableView in ArticleTable 1. Comparative evaluation of reconstruction signals and original signals using three methods
Method RMSE SNR CC EMD 0.096 10.773 94.62 % CEEMD 0.051 12.727 98.72% ICEEMDAN 0.029 15.012 99.87%
Table 2. The relevant technical parameters for self-traceable grating and planar grating
View tableView in ArticleTable 2. The relevant technical parameters for self-traceable grating and planar grating
Parameters Self-traceable grating Planar grating Grating area material Cr - Substrate material Si Float glass Size 1.5 mm×3 mm 25 mm×25 mm×6 mm Linear density/lines·mm−1 4700 3600 Spacing standard value/nm 212.7705 ±0.0049 277.8 Littrow angle at maximum diffraction efficiency $ \theta $ 72.5 46.8
Table 3. The spacing calibration results for the
3600 lines planar gratingView tableView in ArticleTable 3. The spacing calibration results for the
3600 lines planar gratingPhase unwrapping method Phase difference ratio within 0-0.1 s Calibration spacing for this experiment/nm Spacing average of AFM scans/nm Standard deviation/nm Relative error EMD-HT 1.2387 263.6 277.5 13.9 5.01% CEEMD-HT 1.2736 271.0 277.5 6.5 2.34% ICEEMDAN-HT 1.2992 276.4 277.5 1.1 0.40%
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Yanzhen ZHU, Zhiwei LI, Liqin LIU, Yuqing GUAN, Yujie ZHANG, Chuangwei GUO, Qiang LI, Yi LIU, Jinhui CAI, Jun WAN, Lihua LEI. Research on digital calibration of dual-grating interferometric spacing based on ICEEMDAN-HT[J]. Infrared and Laser Engineering, 2024, 53(12): 20240367
Paper Information
Category: 光电测量
Received: Aug. 9, 2024
Accepted: --
Published Online: Jan. 16, 2025
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