Infrared and Laser Engineering, Volume. 51, Issue 5, 20210416(2022)
Laser marking process on transparent materials
Figures & Tables(11)
Fig. 2. Radial distribution of laser energy density based on fitting results
Fig. 3. Measured output spot diameter versus defocus distance of laser processing head
Fig. 4. Relative energy density versus defocus distance of output spot of laser processing head
Fig. 5. Effects of laser beam scanning angle of laser processing head on the geometry deviation of marking position
Fig. 6. Macro photo of laser marking on IR Conning glass at different focusing depths
Fig. 7. Photo of laser marking on the upper surface at relative laser power of 9% and 8% with one scan
Table 1. Laser parameters
View tableView in ArticleTable 1. Laser parameters
Name Parameters Remarks Wavelength 515 (Green) 1030 nm Yb: YAG doubling Average laser power/W 15 1%-100% available Pulse width/ps <10 Picosecond pulse Maximum single pulse energy/μJ 75 1%-100% available Range of repeat frequency/kHz 200-400 Set 200 kHz on this equipment Beam quality (M2) <1.3 Gauss distribution
Table 2. Linos F-Theta-Ronar lens and galvanometer scanning parameters of laser processing
View tableView in ArticleTable 2. Linos F-Theta-Ronar lens and galvanometer scanning parameters of laser processing
Name Parameter Designed operation wavelength/nm 515-540 Effective focal length/mm 104.7 Working distance/mm 138.5 Maximum scan angle/(°) 13.1 Scan area/mm2 46×46 Laser spot diameter/μm 10
Table 3. Initial test result of ps laser marking on IR Corning glass
View tableView in ArticleTable 3. Initial test result of ps laser marking on IR Corning glass
No. Focus position/mm Eye observation Microscope observation Remarks 1 2 Clear Clear-two marks Upper surface 2 1.5 Clear Clear-two marks 3 1 Clear Clear-two marks 4 0.5 Clear Clear-two marks 5 0.4 Clear Clear-two marks 6 0.3 Clear Clear-two marks, nearly on the same plane 7 0.2 Clear Clear-one mark 8 0.1 Clear Clear-one mark 9 0 Clear Clear-one mark Lower surface 10 −0.1 Clear Faint-one mark 11 −0.2 Faint Faint-one mark 12 −0.3 Invisible Invisible
Table 4. Result and strategy of marking on transparent sample
View tableView in ArticleTable 4. Result and strategy of marking on transparent sample
Laser power Focus position Marking characteristic Geometry deviation Marking effect Evaluation Larger Close to upper surface Extend from upper surface to lower surface Little Etching too more, none geometry deviation × Larger Middle Extend from middle to both upper and lower surface Medium Etching even more, have geometry deviation × Larger Lower surface Extend from lower surface to upper surface Large Etching too more, have geometry deviation × Appropriate Close to upper surface Less extend from upper surface to lower surface None Etching suitable, no geometry deviation √ Appropriate Middle Less extend from middle to upper and lower surface Medium Etching suitable, have geometry deviation × Appropriate Lower surface Less extend from lower surface to upper surface Large Etching suitable, have geometry deviation ×
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Yinan Zhang, Wen Sun, Defeng Mo, Qinfei Xu, Xue Li. Laser marking process on transparent materials[J]. Infrared and Laser Engineering, 2022, 51(5): 20210416
Paper Information
Category: Lasers & Laser optics
Received: Jun. 21, 2021
Accepted: --
Published Online: Jun. 14, 2022
The Author Email: Sun Wen (jacksunwen@mail.sitp.ac.cn)
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