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Optics and Precision Engineering, Volume. 18, Issue 5, 1152(2010)

Fabrication of micro spiral acceleration switch using UV-LIGA technology

[in Chinese]1,*... [in Chinese]1, [in Chinese]2, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Optics and Precision Engineering, 2010, 18(5): 1152

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    Paper Information

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    Received: Mar. 25, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: (xlhuang@mail.ustc.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology