Laser & Optoelectronics Progress, Volume. 54, Issue 6, 60501(2017)
Optimal Design of Depth-Scaling Error with Oblique Incidence
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Yang Liangliang, Liu Chenglin, Zhang Zhihai, Tang Jian. Optimal Design of Depth-Scaling Error with Oblique Incidence[J]. Laser & Optoelectronics Progress, 2017, 54(6): 60501
Category: Diffraction and Gratings
Received: Jan. 12, 2017
Accepted: --
Published Online: Jun. 8, 2017
The Author Email: Liangliang Yang (yang_liangliang@163.com)