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Laser & Optoelectronics Progress, Volume. 54, Issue 6, 60501(2017)

Optimal Design of Depth-Scaling Error with Oblique Incidence

Yang Liangliang*, Liu Chenglin, Zhang Zhihai, and Tang Jian
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    Yang Liangliang, Liu Chenglin, Zhang Zhihai, Tang Jian. Optimal Design of Depth-Scaling Error with Oblique Incidence[J]. Laser & Optoelectronics Progress, 2017, 54(6): 60501

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 12, 2017

    Accepted: --

    Published Online: Jun. 8, 2017

    The Author Email: Liangliang Yang (yang_liangliang@163.com)

    DOI:10.3788/lop54.060501

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology