Laser & Optoelectronics Progress, Volume. 54, Issue 6, 60501(2017)
Optimal Design of Depth-Scaling Error with Oblique Incidence
Based on the expression between diffraction efficiency and incident angle and the expression between diffraction efficiency and micro-structure height error under normal incidence, the mathematical relationship between micro-structure height error and diffraction efficiency or polychromatic integral diffraction efficiency (PIDE) for diffractive optical elements (DOEs) under oblique incidence is established. When the absolute value of the relative micro-structure height errors is equal, the corresponding diffraction efficiency and PIDE with negative micro-structure height errors are higher than those with positive micro-structure height errors. The analysis method and conclusion provide a theoretical reference for the determination of the machining tolerance of micro-structure height error for DOEs.
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Yang Liangliang, Liu Chenglin, Zhang Zhihai, Tang Jian. Optimal Design of Depth-Scaling Error with Oblique Incidence[J]. Laser & Optoelectronics Progress, 2017, 54(6): 60501
Category: Diffraction and Gratings
Received: Jan. 12, 2017
Accepted: --
Published Online: Jun. 8, 2017
The Author Email: Liangliang Yang (yang_liangliang@163.com)