Researching | Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system

Chinese Optics Letters, Volume. 13, Issue Suppl., S22201(2015)

Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system

Lingmao Xu, Jizhou Wang^*, Maojin Dong, Duoshu Wang, and Yudong Feng

Author Affiliations

Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730001, China

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[8] W. Wu, J. Z. Wang, Y. Q. Xiong, D. S. Wang, Y. D. Feng. J. Vac. Sci. Technol., 4, 320(2014).

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Lingmao Xu, Jizhou Wang, Maojin Dong, Duoshu Wang, Yudong Feng. Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22201

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Paper Information

Category: Optical Design and Fabrication

Received: Apr. 29, 2015

Accepted: Jul. 9, 2015

Published Online: Aug. 8, 2018

The Author Email: Jizhou Wang (13919878241@139.com)

DOI:10.3788/COL201513.S22201

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology