Chinese Optics Letters, Volume. 13, Issue Suppl., S22201(2015)
Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system
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Fig. 1. Configuration of source-substrate system in the film growth on parabolic substrate.
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Lingmao Xu, Jizhou Wang, Maojin Dong, Duoshu Wang, Yudong Feng. Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22201
Paper Information
Category: Optical Design and Fabrication
Received: Apr. 29, 2015
Accepted: Jul. 9, 2015
Published Online: Aug. 8, 2018
The Author Email: Jizhou Wang (13919878241@139.com)
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