Chinese Optics Letters, Volume. 13, Issue Suppl., S22201(2015)

Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system

Lingmao Xu, Jizhou Wang*, Maojin Dong, Duoshu Wang, and Yudong Feng
Author Affiliations
  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730001, China
  • show less
    Figures & Tables(4)
    Configuration of source-substrate system in the film growth on parabolic substrate.
    Coated arc of the circle x2+y2=ph−pz.
    With L/h=2, the impact of n/h on the calculated coating thickness distribution on parabolic substrate: (a) Point source and (b) surface source.
    Impact of L/h on the calculated coating thickness distribution on parabolic substrate with n/h=1.
    Tools

    Get Citation

    Copy Citation Text

    Lingmao Xu, Jizhou Wang, Maojin Dong, Duoshu Wang, Yudong Feng. Theoretical study of the thickness uniformity of a coating on the inner face of a parabolic substrate in a vacuum evaporation system[J]. Chinese Optics Letters, 2015, 13(Suppl.): S22201

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 29, 2015

    Accepted: Jul. 9, 2015

    Published Online: Aug. 8, 2018

    The Author Email: Jizhou Wang (13919878241@139.com)

    DOI:10.3788/COL201513.S22201

    Topics