Chinese Optics Letters, Volume. 11, Issue 9, 090802(2013)
Glass homogeneity effect on wavefront aberration in lithography projection lens
Cited By
Article index updated:Feb. 24, 2023
Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.
The article is cited by 4 article(s) from Web of Science.
Tools
Get Citation
Copy Citation Text
Hongbo Shang, Wei Huang, Chunlai Liu, Weicai Xu, Wang Yang. Glass homogeneity effect on wavefront aberration in lithography projection lens[J]. Chinese Optics Letters, 2013, 11(9): 090802
Paper Information
Category: Geometric Optics
Received: Apr. 29, 2013
Accepted: Aug. 2, 2013
Published Online: Sep. 3, 2013
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20