Opto-Electronic Engineering, Volume. 50, Issue 4, 220097(2023)

Ultra-precision grinding and polishing processing technology research and equipment development

Yunfeng Peng1...2, Jiakuan He1,2,*, Xuepeng Huang1,2, Jiaming Liu1,2, Zhenzhong Wang1, Chenlei Li1,2 and Jinghang Wang1 |Show fewer author(s)
Author Affiliations
  • 1School of Aerospace Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2Shenzhen Research Institute of Xiamen University, Shenzhen, Guangdong 518057, China
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    References(5)

    [10] [10] Niu Y J. Research on precision grinding and measurement technique for low subsurface damage of monocrystalline silicon curved optics[D]. Changsha: National University of Defense Technology, 2015: 40–52.

    [20] [20] Wang C J. Research on efficient polishing technology of semi-flexible airbags for large-diameter optical components[D]. Xiamen: Xiamen University, 2015: 109–142.

    [23] [23] Hogan N. Impedance control: an approach to manipulation[C]//1984 American Control Conference, 1984.https://doi.org/10.23919/ACC.1984.4788393.

    [24] [24] Huang X P. Study on the removal mechanism and process optimization of robotic airbag polishing material for SiC components[D]. Xiamen: Xiamen University, 2021: 51–65.

    [25] [25] Lin Z W. Research on bonnet polishing technology and process with industrial robot for optics[D]. Xiamen: Xiamen University, 2020: 15–34.

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    Yunfeng Peng, Jiakuan He, Xuepeng Huang, Jiaming Liu, Zhenzhong Wang, Chenlei Li, Jinghang Wang. Ultra-precision grinding and polishing processing technology research and equipment development[J]. Opto-Electronic Engineering, 2023, 50(4): 220097

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    Paper Information

    Category: Article

    Received: May. 25, 2022

    Accepted: Oct. 24, 2022

    Published Online: Jun. 15, 2023

    The Author Email: He Jiakuan (18850470962@163.com)

    DOI:10.12086/oee.2023.220097

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