Opto-Electronic Engineering, Volume. 50, Issue 4, 220097(2023)

Ultra-precision grinding and polishing processing technology research and equipment development

Yunfeng Peng1...2, Jiakuan He1,2,*, Xuepeng Huang1,2, Jiaming Liu1,2, Zhenzhong Wang1, Chenlei Li1,2 and Jinghang Wang1 |Show fewer author(s)
Author Affiliations
  • 1School of Aerospace Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2Shenzhen Research Institute of Xiamen University, Shenzhen, Guangdong 518057, China
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    Figures & Tables(28)
    The appearance of the large diameter precision grinder UPG80 and the overall sheet metal of the machine[11]
    Processing results of the large aperture aspheric elements[15]. (a) Surface shape accuracy (PV=3.38 μm); (b) Subsurface damage depth (h=3 μm)
    Influence of the initial flow Q0 on the motion accuracy[17]. (a) Angular motion error; (b) Displacement motion error; (c) PV value of angular motion error and displacement motion error
    Guide rail distribution view along the X axis of the grinding machine UPG80[11]
    Five-axis CNC bonnet polishing machine[19]. (a) Bonnet polishing machine model diagram; (b) Actual drawing of the bonnet polishing machine
    The principle of bonnet polishing[20]. (a) Precession motion model; (b) Bonnet "AB" pendulum structure
    Maze-based polishing path generation schematic[20]
    Measurement results of roughness in the central region[20]. (a) Grating path; (b) Hilbert path; (c) Maze paths
    Semi-flexible bonnet structure[20]
    The results of shaping and processing front and back[20]. (a) Polishing front shape; (b) Polishing back shape
    Experimental device for flexible precession polishing of space ball[21]
    Diagram of the experimental results[21]. (a) Material removal functions of polishing spots; (b) Surface microscale morphologies of the workpiece before and after
    Block diagram of impedance control algorithm based on environment model[22]
    Experimental results curve of the robot compensation force control[22]. (a) Curve 1 of the force control experiment results; (b) Curve II of the force control experiment results
    Surface finishing quality under varying pressure and steady pressure. (a) Pressure 10 N; (b) Pressure 15 N; (c) Pressure 20 N; (d) Surface machining quality at 10 N steady pressure
    Control frame diagram of the robot airbag polishing system[24]
    Deformation cloud of robot end[26]. (a) Attitude position angle 0°; (b) Attitude position angle 90°
    Bonnet suppression structure[24]. (a) Model diagram of the vibration suppression tool head; (b) Section view of the vibration suppression tool head
    General bonnet whole surface polishing before and after comparison[24]. (a) Before polishing; (b) After polishing
    Comparison before and after the whole surface polishing of vibration suppression airbag[24]. (a) Before polishing; (b) After polishing
    Frame of the intelligent grinding monitoring system[28]
    Online evaluation of the grinding performance of grinding wheel[29]. (a) Acoustic emission waveform and spectrum; (b) Proportion of the low-frequency energy in samples of some nodes; (c) Main features represent grinding performance degradation curve of grinding wheel
    Comparison diagram of LSTM and BPNN network models[30]. (a) Prediction results of LSTM network model; (b) Prediction results of BPNN network model
    5 axis high efficiency bonnet polishing control system. (a) Main interface of the control software; (b) Plane conformal polishing; (c) Aspheric correction polishing
    Block diagram of the intelligent robot assisted grinding and polishing digital twin system
    Human-computer interaction interface
    • Table 1. Technical specifications of the large diameter precision grinding machine UPG80

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      Table 1. Technical specifications of the large diameter precision grinding machine UPG80

      技术指标参数
      可磨削的最大工件尺寸1300 mm×750 mm×550 mm
      工作台承重1500 kg
      数控系统分辨率0.1 μm
      X/Y/Z轴定位精度≤2 μm/300 mm
      X/Y/Z轴重复定位精度≤1 μm/300 mm
    • Table 2. Polishing parameters

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      Table 2. Polishing parameters

      垂直抛光(θ=0°)倾斜抛光(θ=20°)
      电机1转速(r/min)500714
      电机2转速/(r/min)500350
      电机3转速/(r/min)500350
      球旋转速度/(r/min)481482
      抛光时间/s200500
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    Yunfeng Peng, Jiakuan He, Xuepeng Huang, Jiaming Liu, Zhenzhong Wang, Chenlei Li, Jinghang Wang. Ultra-precision grinding and polishing processing technology research and equipment development[J]. Opto-Electronic Engineering, 2023, 50(4): 220097

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    Paper Information

    Category: Article

    Received: May. 25, 2022

    Accepted: Oct. 24, 2022

    Published Online: Jun. 15, 2023

    The Author Email: He Jiakuan (18850470962@163.com)

    DOI:10.12086/oee.2023.220097

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