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Opto-Electronic Engineering, Volume. 50, Issue 4, 220097(2023)

Ultra-precision grinding and polishing processing technology research and equipment development

Yunfeng Peng1...2, Jiakuan He1,2,*, Xuepeng Huang1,2, Jiaming Liu1,2, Zhenzhong Wang1, Chenlei Li1,2 and Jinghang Wang1 |Show fewer author(s)
Author Affiliations
  • 1School of Aerospace Engineering, Xiamen University, Xiamen, Fujian 361005, China
  • 2Shenzhen Research Institute of Xiamen University, Shenzhen, Guangdong 518057, China
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    Yunfeng Peng, Jiakuan He, Xuepeng Huang, Jiaming Liu, Zhenzhong Wang, Chenlei Li, Jinghang Wang. Ultra-precision grinding and polishing processing technology research and equipment development[J]. Opto-Electronic Engineering, 2023, 50(4): 220097

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    Paper Information

    Category: Article

    Received: May. 25, 2022

    Accepted: Oct. 24, 2022

    Published Online: Jun. 15, 2023

    The Author Email: He Jiakuan (18850470962@163.com)

    DOI:10.12086/oee.2023.220097

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology