Infrared and Laser Engineering, Volume. 45, Issue 2, 220003(2016)
Study on removal characteristic of silicon carbide surface in precision mechanical polishing
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Li Zhuolin, W.B. Lee. Study on removal characteristic of silicon carbide surface in precision mechanical polishing[J]. Infrared and Laser Engineering, 2016, 45(2): 220003
Paper Information
Category: 光电器件与微系统
Received: Jun. 5, 2015
Accepted: Jul. 15, 2015
Published Online: Apr. 5, 2016
The Author Email: Zhuolin Li (zhuolinli666@163.com)
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