Spectroscopy and Spectral Analysis, Volume. 29, Issue 4, 935(2009)
Model-Based FTIR Reflectometry Measurement System for Deep Trench Structures of DRAM
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LIU Shi-yuan, ZHANG Chuan-wei, SHEN Hong-wei, GU Hua-yong. Model-Based FTIR Reflectometry Measurement System for Deep Trench Structures of DRAM[J]. Spectroscopy and Spectral Analysis, 2009, 29(4): 935
Paper Information
Received: Oct. 8, 2007
Accepted: --
Published Online: May. 25, 2010
The Author Email: Shi-yuan LIU (shyliu@mail.hust.edu.cn)
CSTR:32186.14.
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