[1] [1] KOTHIYAL M P, DELISLE C. Shearing interferomater for phase shifting interferometry with polarization phase shifter［J］. Applied Optics, 1985, 24(24): 4439-4442.

[2] [2] SONG J B, LEE Y W, LEE Y H. Simple phase-shifting method in a wedge-plate lateral-shearing interferometer ［J］. Applied Optics, 2004,43(20): 3989-3992.

[3] [3] ZHU Y C, ODATE S O, SUGAYA A S, et al.. Method for designing phase-calculation algorithms for two-dimensional grating phase-shifting interferometry［J］. Applied Optics, 2011, 50 (18): 2815-2822.

[4] [4] GUO T, HU CH G, CHEN J P, et al.. Temporal phase-shifting microscopic interferometry for geometrical characterization of MEMS devices［J］. Nanotechnology and Precision Engineering, 2008, 6(1): 44-49. (in Chinese)

[5] [5] CARR P. Installation et utilisation du comparateur photoelectrique et interferentiel du Bureau international des poids et mesures［J］. Metrologia, 1966, 2(11): 13-23.

[6] [6] WYANT J C, CREATH K. Recent advances in interferometric optic testing ［J］. Laser Focus/Electro-Optics, 1985, 32(11): 118-132.

[7] [7] BRUNING J H, HERRIOT D R, GALLAGER J E, et al.. Digital wavefront measuring interferometer for testing optical surfaces and lenses ［J］. Applied Optics, 1974, 13(8): 2693-2703.

[8] [8] WANG L J, LIU L R, LUAN ZH, et al.. Phase shifting Jamin lateral shearing interferometer［J］. Chinese Journal of Lasers, 2009,30(5): 1156-1159. (in Chinese)

[9] [9] KONG M M, GAO ZH SH, CHEN L, et al.. Cyslic radia shearing interferometry based on polarization phase-shifting technique ［J］. Acta Optica Sinica, 2010, 30(1): 127-131. (in Chinese)

[10] [10] GOLDBERG K A, NAULLEAU P, BRESLOFF C, et al.. Extreme ultraviolet interferometry: at-wavelength testing of optics for lithography［J］. Optical Engineering, 2008, 47(2): 025006-1-025006-4.

[11] [11] ZHU Y C, SUGISAKI K, OKADA M, et al.. Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography ［J］. Applied Optics, 2007, 46(11): 6783-6792.

[12] [12] BU J Y, HE G P. Design and analysis of position complaint mechanisms［J］. Machine Design and Research, 2009, 25(3): 44-47.

[13] [13] XUE SH F, LI Q X. Design of Precision Instrument ［M］. Beijing: Tsinghua University Press, 1991. (in Chinese)

[14] [14] LIU H W. Material Mechanics ［M］. Beijing: Higher Education Press, 1992. (in Chinese)