Optics and Precision Engineering, Volume. 21, Issue 9, 2244(2013)
Phase-shifting technology of digital lateral shearing interferometer
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HE Xu, XIANG Yang. Phase-shifting technology of digital lateral shearing interferometer[J]. Optics and Precision Engineering, 2013, 21(9): 2244
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Received: Jun. 8, 2012
Accepted: --
Published Online: Sep. 25, 2013
The Author Email: Xu HE (911max@sina.com)
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