Acta Photonica Sinica, Volume. 46, Issue 9, 912008(2017)
Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting
[1] [1] LIU Yong-ming,XIE Jun,TIAN Wei,et al.Inverse modeling of mirror surface figure based on finite element contact analysis[J].Acta Photonica Sinica, 2014,43(8):0812001.
[2] [2] DAI Lei, SUI Yong-xin, WU Di. Precision of measuring system of radius of curvature using laser interference method[J].Infrared and Laser Engineering,2013,42(8):2221-2225.
[3] [3] VANNONIM.Absolute flatness measurement using oblique incidence setup and an iterative algorithm[J].Optics Express,2014,22(3): 3538-3546.
[5] [5] E Ke-wei, LI Da-hai, ZHANG Chen, et al. Four-step shear method for the absolute measurement of a flat surface based on phase measuring deflectometry[J].Applied Optics,2016,55(30):8419-8425.
[6] [6] SONG Wei-hong,HOU Xi,WU Fan, et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J].Applied Optics,2013,24(52):5974-5978.
[7] [7] HAN Dong-song,HE Xin,WEI Zhong-hui, et al. Error correction of interferometer detection with high-accuracy rotation method[J].Optics and Precision Engineering,2015,23(5):1291-1303.
[9] [9] GRIESMANN U. Three-flat test solutions based on simple mirror symmetry[J].Applied Optics,2006,45(23):5856-5865.
[10] [10] CHEN Xu,YUAN Wen-quan,FENG Yu-tao, et al. Study of the error of the reference lens in absolute spherical testing and the thermal deformation model establishment[J].Acta Optica Sinica, 2011,31(2):0212002
[11] [11] FUJIMOTO I, TAKATSUJI T, NISHIMURA K, et al. Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface[J].Applied Optics,2012,55(30):8419-8425.
[12] [12] ZHU-Shuo. Study on technology for large optic flat mirror testing[D]. Beijing: Chinese Academy of Science,2014.
[13] [13] SONG Wei-hong,WU Fan,HOU Xi, et al. Absolute measurement of flats with the method of shift-rotation[J].Optical Review,2013,20(5):374-377.
[14] [14] TIAN Ai-ling,ZHENG Xian-feng,LIU Bing-cai, et al. Absolute measurement of 3D Surface[J].Journal of Xi′an Technological University, 2012,32(6):431-436.
[15] [15] SCHREINER R, SCHWIDER J, LINDLEIN N,et al. Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions[J]. Applied Optics, 2008, 47(32):6134-6141.
[16] [16] YUMOTO H, MATSUYAMA S, MIMURA H, et al. Absolute calibration of optical flats using the three-flat test by considering the relative humidity change[J].Nuclear Inst & Methods in Physics Research A, 2013, 710(3):2-6.
[17] [17] CHATTERJEE S, KUMAR Y P. Measurement of the surface form error of a spherical surface with a wedge phase shifting Fizeau interferometer[J].Journal of Optics, 2013, 42(2):122-127.
[19] [19] FRITZ B S. Absolute calibration of an optical flat[J].Optical Engineering, 1984,23(4):379-383.
Get Citation
Copy Citation Text
GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. Acta Photonica Sinica, 2017, 46(9): 912008
Received: Mar. 28, 2017
Accepted: --
Published Online: Oct. 16, 2017
The Author Email: Fei GAO (gfgf_861031@163.com)