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Acta Photonica Sinica, Volume. 46, Issue 9, 912008(2017)

Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting

GAO Fei1、*, LI Jin-hui1,2, TIAN Ai-ling3, LIU Bing-cai3, LI Shi-jie3, and YUE Xin3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. Acta Photonica Sinica, 2017, 46(9): 912008

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    Paper Information

    Received: Mar. 28, 2017

    Accepted: --

    Published Online: Oct. 16, 2017

    The Author Email: Fei GAO (gfgf_861031@163.com)

    DOI:10.3788/gzxb20174609.0912008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology