Acta Photonica Sinica, Volume. 46, Issue 9, 912008(2017)
Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting
Based on Zernike polynomials fitting, the measurement errors posed by optical axis deviation, rotation angle and active area on different types of high-precision surface were analyzed and the experimental verifications were conducted respectively. The results show that the measurement is not sensitive to the rotation angle and active area, the cost of calibrated rotation angle can therefore be reduced, while the impact of optical axis deviation on measurement precision is rather significant, which should be strictly adjusted before the test on high-precision surface.
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GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. Acta Photonica Sinica, 2017, 46(9): 912008
Received: Mar. 28, 2017
Accepted: --
Published Online: Oct. 16, 2017
The Author Email: Fei GAO (gfgf_861031@163.com)