Fig. 1. Decomposition of frog movement

Fig. 2. Structural decomposition of the compliant guide platform

Fig. 3. Integral tool servo device

Fig. 4. Design points with different radius and thicknesses

Fig. 5. Radius sensitivity analysis results

Fig. 6. Minimum thickness sensitivity analysis results

Fig. 7. Multi-objective optimization of design points

Fig. 8. Simulation results of X- and Y-axis displacements of parameter optimized model

Fig. 9. Modal cloud of the parameter optimized model

Fig. 10. Topology optimization results

Fig. 11. Input and output topology optimization results

Fig. 12. Simulation results of X- and Y-axis displacements of topology optimized model

Fig. 13. Modal cloud of topology optimized model

Fig. 14. Relationship between input displacement and stress， output displacement

Fig. 15. Experimental prototype

Fig. 16. Experimental testbed system

Fig. 17. Measurement points of the prototype's inputs and outputs

Fig. 18. Plot of modal test result

Fig. 19. Plot of displacement changes

Fig. 20. Trajectory tracking and error

Fig. 21. Prototype and piezoelectric actuator hysteresis curves

Fig. 22. Sample resolution test result