Acta Photonica Sinica, Volume. 50, Issue 11, 1111001(2021)

Development and Application Test of Scattering-type Scanning Near-field Optical Microscope

Nan CHEN1...2, Yue WANG1,*, Tao LIU1,2,*, and Yang XIA1,2,34 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China
  • 4Beijing Key Laboratory of IC Test Technology,Beijing 100029,China
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    References(18)

    [5] Jiahua DUAN, Jianing CHEN. Recent progress of near-field studies of two-dimensional polaritonics. Acta Physica Sinica, 68, 110701(2019).

    [12] T NEUMAN, P ALONSO-GONZALEZ, A GARCIA-ETXARRI et al. Mapping the near fields of plasmonic nanoantennas by scattering-type scanning near-field optical microscopy. Laser Photonics Review, 9, 637-649(2016).

    [15] Debo HU, Qing DAI. Near-field optical characterization of low-dimensional nanomaterials. Chinese Science Bulletin, 63, 67-79(2018).

    [16] Nan CHEN, Yue WANG, Boyu WANG et al. Research on numerical model of nano-FTIR system based on COMSOL. Spectroscopy and Spectral Analysis, 41, 1125-1130(2021).

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    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001

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    Paper Information

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    Received: Jun. 16, 2021

    Accepted: Jul. 19, 2021

    Published Online: Dec. 2, 2021

    The Author Email: WANG Yue (wangyue@ime.ac.cn), LIU Tao (liutao@ime.ac.cn)

    DOI:10.3788/gzxb20215011.1111001

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