Acta Photonica Sinica, Volume. 50, Issue 11, 1111001(2021)

Development and Application Test of Scattering-type Scanning Near-field Optical Microscope

Nan CHEN1...2, Yue WANG1,*, Tao LIU1,2,*, and Yang XIA1,2,34 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China
  • 4Beijing Key Laboratory of IC Test Technology,Beijing 100029,China
  • show less
    Figures & Tables(8)
    s-SNOM schematic and physical diagram
    Point-dipole model and COMSOL finite element simulation results
    s-SNOM approach curve of 1Ω,2Ω,3Ω
    AFM topography and1Ω,2Ω,and 3Ω near-field optical imaging of gold-silicon grating sample
    The center of the focused spot changes with time
    AFM topography and s-SNOM imaging map of gold nanoparticle samples
    AFM topography and s-SNOM imaging map of h-BN samples
    • Table 1. Signal and noise comparison under different demodulation orders

      View table
      View in Article

      Table 1. Signal and noise comparison under different demodulation orders

      Demodulation frequency1Ω2Ω3Ω4Ω
      Signal5.2 mV824 μV127 μV38 μV
      Noise(RMS)107 μV13.63 μV1.97 μV1.53 μV
      SNR33.7 dB35.6 dB36.1 dB27.8 dB
      Noise(RMS)/Stage-off37.1 μV2.4 μV1.23 μV1.02 μV
    Tools

    Get Citation

    Copy Citation Text

    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jun. 16, 2021

    Accepted: Jul. 19, 2021

    Published Online: Dec. 2, 2021

    The Author Email: WANG Yue (wangyue@ime.ac.cn), LIU Tao (liutao@ime.ac.cn)

    DOI:10.3788/gzxb20215011.1111001

    Topics