Acta Photonica Sinica, Volume. 50, Issue 11, 1111001(2021)

Development and Application Test of Scattering-type Scanning Near-field Optical Microscope

Nan CHEN1,2, Yue WANG1、*, Tao LIU1,2、*, and Yang XIA1,2,3,4
Author Affiliations
  • 1Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029,China
  • 2University of Chinese Academy of Sciences,Beijing 100049,China
  • 3Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication,Beijing 100029,China
  • 4Beijing Key Laboratory of IC Test Technology,Beijing 100029,China
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    Based on scanning probe microscope, a set of scattering scanning near-field optical imaging device is designed. The structure of the device and the basic near-field signal detection principle are introduced, andthe influence of the demodulation order, focus spot size and other factors on the near-field optical signal extraction are discussed through models and experiments. In order to verify the performance of the device, a sample of gold nano-particles and a sample of h-BN microcrystals be characterized. The results show that the home-made device achieves a spatial resolution of 10 nm, and the standing wave phenomenon formed by the h-BN phonon polarization excimer can be clearly observed, demonstrating the huge application potential of this technology.

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    Nan CHEN, Yue WANG, Tao LIU, Yang XIA. Development and Application Test of Scattering-type Scanning Near-field Optical Microscope[J]. Acta Photonica Sinica, 2021, 50(11): 1111001

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    Paper Information

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    Received: Jun. 16, 2021

    Accepted: Jul. 19, 2021

    Published Online: Dec. 2, 2021

    The Author Email: WANG Yue (wangyue@ime.ac.cn), LIU Tao (liutao@ime.ac.cn)

    DOI:10.3788/gzxb20215011.1111001

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