Spectroscopy and Spectral Analysis, Volume. 36, Issue 7, 2048(2016)
Influence of Nitrogen Flow Rate on the Structure and Luminescence Properties of Silicon-Rich Silicon Nitride Film Materials in a High Hydrogen Atmosphere
[1] [1] So Y H, Huang S J, Conibeer G, et al. Thin Solid Films, 2011, 519: 5408.
[3] [3] Park N M, Choi C J, Seong T Y, et al. Phys. Rev. Lett., 2001, 86(7): 1355.
[4] [4] Kim T W, Cho C H, Kim B H, et al. Appl. Phys. Lett., 2006, 88(12): 123102-1.
[5] [5] Wang M, Xie M. Ferraioli L, et al. J. Appl. Phys., 2008, 104(8): 083504-1.
[6] [6] Wang M H, Yang D R, Li D S, et al. J. Appl. Phys., 2007, 101(10): 103504-1.
[7] [7] Molinari E M, Rinnert H, Vergnat M. J. Phys. D: Appl. Phys., 2008, 41: 175410.
[8] [8] Lee K M, Kim T H, Hwang J D, et al. Scripta Materialia, 2009, 60: 703.
[9] [9] Kim B H, Cho C H, Kim T W, et al. Appl. Phys. Lett., 2005, 86(9): 091908-1.
[10] [10] Mckel H, Lüdemann R. J. Appl. Phys., 2002, 92(5): 2602.
[11] [11] Molinari M, Rinnert H, Vergnat M. Appl. Phys. Lett., 2001, 79(14): 2172.
[13] [13] Wang M H, Li D S, Yuan Z Z, et al. Appl. Phys. Lett., 2007, 90(13): 131903-1.
[14] [14] Molinari M, Rinnert H, Vergnat M. J. Appl. Phys., 2007, 101(12): 123532-1.
[15] [15] He Y L, Yin C Z, Cheng G X, et al. Appl. Phys., 1994, 75(2): 797.
[16] [16] Langford A A, Fleet M L, Nelson B P, et al. Phys. Rev. B, 1992, 45(23): 13367.
[17] [17] Park N M, Kim S H, Sung G Y, et al. Chemical Vapor Deposition, 2002, 8(6): 254.
[18] [18] Wang W X, Li D H, Liu Z C, et al. Appl. Phys. Lett., 1993, 62(3): 321.
[20] [20] Zhang Longlong, Zhou Bingqing, Zhang Linrui, et al. Bulletin of the Chinese Ceramic Society, 2014, 33(4): 757
[23] [23] Hao H L, Wu L K, Shen W Z. Appl. Phys. Lett., 2007, 91(20): 201922-1.
[24] [24] Mo C M, Zhang L D, Xie C Y, et alT. J. Appl. Phys., 1993, 73(10): 5185.
[25] [25] Mercaldo L V, Esposito E M, Veneri P D, et al. J. Appl. Phys., 2011, 109(9): 093512.
[26] [26] Cullis A G, Canham L T, Calcott P D J. J. Appl. Phys., 1997, 82(3): 909.
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ZHANG Lin-rui, ZHOU Bing-qing, ZHANG Na, LU Xiao-cui, WUREN Tu-ya, GAO Ai-ming. Influence of Nitrogen Flow Rate on the Structure and Luminescence Properties of Silicon-Rich Silicon Nitride Film Materials in a High Hydrogen Atmosphere[J]. Spectroscopy and Spectral Analysis, 2016, 36(7): 2048
Received: May. 20, 2015
Accepted: --
Published Online: Dec. 23, 2016
The Author Email: Lin-rui ZHANG (zlrain12@163.com)