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Spectroscopy and Spectral Analysis, Volume. 36, Issue 7, 2048(2016)

Influence of Nitrogen Flow Rate on the Structure and Luminescence Properties of Silicon-Rich Silicon Nitride Film Materials in a High Hydrogen Atmosphere

ZHANG Lin-rui*... ZHOU Bing-qing, ZHANG Na, LU Xiao-cui, WUREN Tu-ya and GAO Ai-ming |Show fewer author(s)
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    ZHANG Lin-rui, ZHOU Bing-qing, ZHANG Na, LU Xiao-cui, WUREN Tu-ya, GAO Ai-ming. Influence of Nitrogen Flow Rate on the Structure and Luminescence Properties of Silicon-Rich Silicon Nitride Film Materials in a High Hydrogen Atmosphere[J]. Spectroscopy and Spectral Analysis, 2016, 36(7): 2048

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    Paper Information

    Received: May. 20, 2015

    Accepted: --

    Published Online: Dec. 23, 2016

    The Author Email: Lin-rui ZHANG (zlrain12@163.com)

    DOI:10.3964/j.issn.1000-0593(2016)07-2048-07

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology