Researching | Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications

Acta Photonica Sinica, Volume. 51, Issue 6, 0606005(2022)

Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications

Jiashun LI... Pinggang JIA, Jun WANG, Jia LIU, Guowen AN and Jijun XIONG* |Show fewer author(s)

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State Key Laboratory of Dynamic Measurement Technology，North University of China，Taiyuan 030051，China

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Jiashun LI, Pinggang JIA, Jun WANG, Jia LIU, Guowen AN, Jijun XIONG. Silica-MEMS-based Fiber-optic Fabry-Perot Pressure Sensor for High-temperature Applications[J]. Acta Photonica Sinica, 2022, 51(6): 0606005

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Paper Information

Category: Fiber Optics and Optical Communications

Received: Mar. 3, 2022

Accepted: Apr. 18, 2022

Published Online: Sep. 23, 2022

The Author Email: XIONG Jijun (xiongjijun@nuc.edu.cn)

DOI:10.3788/gzxb20225106.0606005

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology