Fig. 1. All-silica fiber-optic FP pressure sensor

Fig. 2. FP cavity MEMS etching process flow chart

Fig. 3. Fabrication process of the all-silica pressure sensor based on the silica wafer

Fig. 4. Experimental setup of high-temperature static pressure test

Fig. 5. High-temperature static pressure experimental results of the proposed all-silica fiber-optic pressure sensor

Fig. 6. Repeatability and stability experimental results of the proposed all-silica fiber-optic pressure sensor

Fig. 7. Room-temperature dynamic pressure experimental results of the proposed all-silica fiber-optic pressure sensor