Optoelectronics Letters, Volume. 10, Issue 5, 347(2014)
Effects of parameters on the performance of amorphousIGZO thin films prepared by RF magnetron sputtering
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NIU Jian-wen, MA Rui-xin, WANG Yuan-yuan, LI Shi-na, CHENG Shi-yao, LIU Zi-lin. Effects of parameters on the performance of amorphousIGZO thin films prepared by RF magnetron sputtering[J]. Optoelectronics Letters, 2014, 10(5): 347
Received: Jun. 29, 2014
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Rui-xin MA (maruixin@ustb.edu.cn)