Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Optoelectronics Letters, Volume. 10, Issue 5, 347(2014)

Effects of parameters on the performance of amorphousIGZO thin films prepared by RF magnetron sputtering

Jian-wen NIU1... Rui-xin MA1,2,*, Yuan-yuan WANG1, Shi-na LI1, Shi-yao CHENG1 and Zi-lin LIU1 |Show fewer author(s)
Author Affiliations
  • 1School of Metallurgical and Ecological Engineering, University of Science and Technology Beijing, Beijing 100083,China
  • 2Beijing Key Lab. of Green Recycling and Extraction of Metals, University of Science and Technology Beijing, Beijing100083, China
    • show less
    Abstract
    Figures&Tables (0)
    Equations (0)
    References (14)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    NIU Jian-wen, MA Rui-xin, WANG Yuan-yuan, LI Shi-na, CHENG Shi-yao, LIU Zi-lin. Effects of parameters on the performance of amorphousIGZO thin films prepared by RF magnetron sputtering[J]. Optoelectronics Letters, 2014, 10(5): 347

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Received: Jun. 29, 2014

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Rui-xin MA (maruixin@ustb.edu.cn)

    DOI:10.1007/s11801-014-4125-4

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology