Acta Photonica Sinica, Volume. 43, Issue 9, 914006(2014)

The Design of Reflective Scanning Device for Drilling the Inverted Cone Micro-hole with Femtosecond Laser Pulses

ZHAO Hua-long*... ZHOU Ren-kui, ZHAO Wei, YANG Xiao-jun, LI Ming and JIA Hai-ni |Show fewer author(s)
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    ZHAO Hua-long, ZHOU Ren-kui, ZHAO Wei, YANG Xiao-jun, LI Ming, JIA Hai-ni. The Design of Reflective Scanning Device for Drilling the Inverted Cone Micro-hole with Femtosecond Laser Pulses[J]. Acta Photonica Sinica, 2014, 43(9): 914006

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    Paper Information

    Received: Nov. 14, 2013

    Accepted: --

    Published Online: Oct. 23, 2014

    The Author Email: Hua-long ZHAO (zhl.76@163.com)

    DOI:10.3788/gzxb20144309.0914006

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