Acta Photonica Sinica, Volume. 43, Issue 9, 914006(2014)
The Design of Reflective Scanning Device for Drilling the Inverted Cone Micro-hole with Femtosecond Laser Pulses
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ZHAO Hua-long, ZHOU Ren-kui, ZHAO Wei, YANG Xiao-jun, LI Ming, JIA Hai-ni. The Design of Reflective Scanning Device for Drilling the Inverted Cone Micro-hole with Femtosecond Laser Pulses[J]. Acta Photonica Sinica, 2014, 43(9): 914006
Received: Nov. 14, 2013
Accepted: --
Published Online: Oct. 23, 2014
The Author Email: Hua-long ZHAO (zhl.76@163.com)