Laser Journal, Volume. 45, Issue 6, 33(2024)

Chromatic confocal displacement measurement system with large range and high linearity

XIAO Kang1...2,3, CHEN Xiaojun1,2, and WU Yongqian1,23,* |Show fewer author(s)
Author Affiliations
  • 1National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    References(7)

    [2] [2] Courtney-Pratt J S. The Use of Our Specially Designed Nonachromatic Microscope Objective to Examine Tracks in Nuclear Emulsionst[J]. Optical Engineering, 1976, 15(4): 379-383.

    [3] [3] Boyde A. Colour - coded stereo images from the tandem scanning reflected light microscope (TSRLM)[J]. Journal of microscopy, 1987, 146(2): 137-142.

    [4] [4] Shi K B, Li P, Yin S Z, et al. Chromatic confocal microscopy using supercontinuum light[J]. Optics Express, 2004, 12(10): 2096-2101.

    [5] [5] Minoni U, Manili G, Bettoni S, et al. Chromatic confocal setup for displacement measurement using a supercontinuum light source[J]. Optics and Laser Technology, 2013, 49: 91-94.

    [17] [17] Novak J, Miks A. Hyperchromats with linear dependence of longitudinal chromatic aberration on wavelength[J]. Optik, 2005, 116(4): 165-168.

    [18] [18] Miks A, Novak J, Novák P. Theory of hyperchromats with linear longitudinal chromatic aberration[C]//14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. SPIE, 2006, 5945: 250-255.

    [19] [19] Mik A, Novák J, Novák P. Theory of chromatic sensor for topography measurements[C]//15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics. SPIE, 2007, 6609: 242-250.

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    XIAO Kang, CHEN Xiaojun, WU Yongqian. Chromatic confocal displacement measurement system with large range and high linearity[J]. Laser Journal, 2024, 45(6): 33

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    Paper Information

    Category:

    Received: Nov. 14, 2023

    Accepted: Nov. 26, 2024

    Published Online: Nov. 26, 2024

    The Author Email: Yongqian WU (wyq95111@sina.com)

    DOI:10.14016/j.cnki.jgzz.2024.06.033

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