Chromatic confocal displacement measurement system with large range and high linearity

XIAO Kang; CHEN Xiaojun; WU Yongqian

doi:10.14016/j.cnki.jgzz.2024.06.033

Laser Journal, Volume. 45, Issue 6, 33(2024)

Chromatic confocal displacement measurement system with large range and high linearity

XIAO Kang1...2,3, CHEN Xiaojun1,2, and WU Yongqian1,23,* |Show fewer author(s)

¹National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China

²Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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XIAO Kang, CHEN Xiaojun, WU Yongqian. Chromatic confocal displacement measurement system with large range and high linearity[J]. Laser Journal, 2024, 45(6): 33

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Paper Information

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Received: Nov. 14, 2023

Accepted: Nov. 26, 2024

Published Online: Nov. 26, 2024

The Author Email: Yongqian WU (wyq95111@sina.com)

DOI:10.14016/j.cnki.jgzz.2024.06.033

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

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