Chinese Physics B, Volume. 29, Issue 9, (2020)

Effect of annealing temperature on interfacial and electrical performance of Au–Pt–Ti/HfAlO/InAlAs metal–oxide–semiconductor capacitor

He Guan, Cheng-Yu Jiang, and Shao-Xi Wang
Author Affiliations
  • Northwestern Polytechnical University, Xi’an 710072, China
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    He Guan, Cheng-Yu Jiang, Shao-Xi Wang. Effect of annealing temperature on interfacial and electrical performance of Au–Pt–Ti/HfAlO/InAlAs metal–oxide–semiconductor capacitor[J]. Chinese Physics B, 2020, 29(9):

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    Paper Information

    Received: Mar. 12, 2020

    Accepted: --

    Published Online: Apr. 29, 2021

    The Author Email: Guan He (he.guan@nwpu.edu.cn)

    DOI:10.1088/1674-1056/ab8a34

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