Laser & Optoelectronics Progress, Volume. 59, Issue 11, 1100010(2022)
Research Progress of Maskless Digital Lithography Based on Digital Micromirror Device
Fig. 1. Overall design block diagram of maskless lithography system based on DMD
Fig. 2. Schematic diagram of the DMD structure[6]
Fig. 3. Structure of the DMD-based maskless digital scanning lithography exposure system[7]
Fig. 4. DMD maskless lithography system based on oblique scanning[11]
Fig. 5. Schematic diagram of the stepping lithography
Fig. 6. Aspheric microlens. (a) Magnifying image; (b) three-dimensional image of one microlens[32]
Fig. 7. Microlens arrays fabricated under non-vibrational and vibrational projections [36]
Fig. 8. Haversian bone-mimicking scaffolds obtained by 3D printing [41]
Fig. 9. System composition and design. (a) Schematic illustration of the DMD-based optical projection lithography system; (b) amplification of the microfluidic chip; (c) design of the multi-dimensional cell co-culture system [42]
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Fanglin Xie, Lei Wang, Shengzhou Huang. Research Progress of Maskless Digital Lithography Based on Digital Micromirror Device[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1100010
Category: Reviews
Received: Jul. 22, 2021
Accepted: Sep. 8, 2021
Published Online: Jun. 9, 2022
The Author Email: Huang Shengzhou (1024739781@qq.com)