Laser & Optoelectronics Progress, Volume. 59, Issue 11, 1100010(2022)

Research Progress of Maskless Digital Lithography Based on Digital Micromirror Device

Fanglin Xie, Lei Wang, and Shengzhou Huang*
Author Affiliations
  • School of Mechanical Engineering, Anhui Polytechnic University, Wuhu 241000, Anhui , China
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    Figures & Tables(9)
    Overall design block diagram of maskless lithography system based on DMD
    Schematic diagram of the DMD structure[6]
    Structure of the DMD-based maskless digital scanning lithography exposure system[7]
    DMD maskless lithography system based on oblique scanning[11]
    Schematic diagram of the stepping lithography
    Aspheric microlens. (a) Magnifying image; (b) three-dimensional image of one microlens[32]
    Microlens arrays fabricated under non-vibrational and vibrational projections [36]
    Haversian bone-mimicking scaffolds obtained by 3D printing [41]
    System composition and design. (a) Schematic illustration of the DMD-based optical projection lithography system; (b) amplification of the microfluidic chip; (c) design of the multi-dimensional cell co-culture system [42]
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    Fanglin Xie, Lei Wang, Shengzhou Huang. Research Progress of Maskless Digital Lithography Based on Digital Micromirror Device[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1100010

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    Paper Information

    Category: Reviews

    Received: Jul. 22, 2021

    Accepted: Sep. 8, 2021

    Published Online: Jun. 9, 2022

    The Author Email: Huang Shengzhou (1024739781@qq.com)

    DOI:10.3788/LOP202259.1100010

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