Opto-Electronic Science, Volume. 3, Issue 6, 230053(2024)
High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses
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Kotaro Obata, Shota Kawabata, Yasutaka Hanada, Godai Miyaji, Koji Sugioka. High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses[J]. Opto-Electronic Science, 2024, 3(6): 230053
Category: Research Articles
Received: Dec. 31, 2023
Accepted: Apr. 28, 2024
Published Online: Sep. 23, 2024
The Author Email: Sugioka Koji (KSugioka)