Opto-Electronic Science, Volume. 3, Issue 6, 230053(2024)

High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses

Kotaro Obata... Shota Kawabata, Yasutaka Hanada, Godai Miyaji and Koji Sugioka* |Show fewer author(s)
References(39)

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[13] N Hodgson, H Allegre, A Starodoumov et al. Femtosecond laser ablation in burst mode as a function of pulse fluence and intra-burst repetition rate. J Laser Micro Nanoeng, 15, 236-244(2020).

[18] K Obata, F Caballero-Lucas, K Sugioka. Material processing at GHz burst mode by femtosecond laser ablation. J Laser Micro Nanoeng, 16, 19-23(2021).

[29] KH Buschow, RW Cahn, MC Flemings et al. Properties, growth and applications. Encyclopedia of Materials: Science and Technology(2001).

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Kotaro Obata, Shota Kawabata, Yasutaka Hanada, Godai Miyaji, Koji Sugioka. High performance micromachining of sapphire by laser induced plasma assisted ablation (LIPAA) using GHz burst mode femtosecond pulses[J]. Opto-Electronic Science, 2024, 3(6): 230053

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Paper Information

Category: Research Articles

Received: Dec. 31, 2023

Accepted: Apr. 28, 2024

Published Online: Sep. 23, 2024

The Author Email: Sugioka Koji (KSugioka)

DOI:10.29026/oes.2024.230053

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