Chinese Optics Letters, Volume. 15, Issue 6, 062201(2017)
Versatile nanosphere lithography technique combining multiple-exposure nanosphere lens lithography and nanosphere template lithography
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Yonghui Zhang, Zihui Zhang, Chong Geng, Shu Xu, Tongbo Wei, Wen'gang Bi. Versatile nanosphere lithography technique combining multiple-exposure nanosphere lens lithography and nanosphere template lithography[J]. Chinese Optics Letters, 2017, 15(6): 062201
Category: Optical Design and Fabrication
Received: Jan. 23, 2017
Accepted: Feb. 17, 2017
Published Online: Jul. 20, 2018
The Author Email: Tongbo Wei (tbwei@semi.ac.cn)