Journal of Applied Optics, Volume. 40, Issue 2, 284(2019)
Research on high deterministic removal characteristics of fused quartz using RF focused ion beam source
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XI Yingxue, LIU Weiguo, MA Zhanpeng, ZHANG Jin, ZHOU Shun. Research on high deterministic removal characteristics of fused quartz using RF focused ion beam source[J]. Journal of Applied Optics, 2019, 40(2): 284
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Received: Jan. 5, 2018
Accepted: --
Published Online: Mar. 26, 2019
The Author Email: Yingxue XI (xiyingxue@163.com)
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