Optics and Precision Engineering, Volume. 24, Issue 7, 1550(2016)

Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm

ZHOU Hong-jun1,*... XIA Xuan-zhi2, HUO Tong-lin1 and ZHENG Jin-jin2 |Show fewer author(s)
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    [8] [8] CANFIELD L R, VEST R E, KORDE R, et al.. Absolute silicon photodiodes for 169 nm to 254 nm photons [J]. Metrologia, 1998, 35: 329-334.

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    ZHOU Hong-jun, XIA Xuan-zhi, HUO Tong-lin, ZHENG Jin-jin. Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm[J]. Optics and Precision Engineering, 2016, 24(7): 1550

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    Paper Information

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    Received: Feb. 26, 2016

    Accepted: --

    Published Online: Aug. 29, 2016

    The Author Email: Hong-jun ZHOU (hjzhou@ustc.edu.cn)

    DOI:10.3788/ope.20162407.1550

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