Optics and Precision Engineering, Volume. 24, Issue 7, 1550(2016)
Distribution and suppression of higher-order harmonics of metrology beamline in 5～140 nm
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ZHOU Hong-jun, XIA Xuan-zhi, HUO Tong-lin, ZHENG Jin-jin. Distribution and suppression of higher-order harmonics of metrology beamline in 5～140 nm[J]. Optics and Precision Engineering, 2016, 24(7): 1550
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Received: Feb. 26, 2016
Accepted: --
Published Online: Aug. 29, 2016
The Author Email: Hong-jun ZHOU (hjzhou@ustc.edu.cn)
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