Optics and Precision Engineering, Volume. 31, Issue 1, 99(2023)
Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon
Figures & Tables(10)
Fig. 1. Laser in situ assisted ultra-precision cutting experimental devices
Fig. 3. Main effect diagram for mean value of surface roughness signal-to-noise ratio
Fig. 4. Monocrystalline silicon aspheric lens with diameter of 165 nm machined by in situ laser assisted ultra-precision machining
Fig. 6. Residual stress on machined surface of monocrystalline silicon
Fig. 7. Surface charateristics of silicon machine by laser assisted ultra-precision cutting
Table 1. Processing factors and level of orthogonal test
View tableView in ArticleTable 1. Processing factors and level of orthogonal test
工艺因素 单位 水平1 水平2 水平3 水平4 主轴转速s r/min 1500 2500 3500 4500 进给速率f mm/min 1 3 5 7 切削深度dc μm 3 6 9 12 激光功率p W 1.5 2.5 3.5 4.5
Table 2. 正交表与加工表面粗糙度结果
View tableView in ArticleTable 2. 正交表与加工表面粗糙度结果
序号 主轴转速s/（r·min-1） 进给速率f/（mm·min-1） 切削深度dc/μm 激光功率p/W 粗糙度 1 1 500 1 3 1.5 4.950 2 1 500 3 6 2.5 16.977 3 1 500 5 9 3.5 2.663 4 1 500 7 12 4.5 4.121 5 2 500 1 6 3.5 9.455 6 2 500 3 3 4.5 8.170 7 2 500 5 12 1.5 10.338 8 2 500 7 9 2.5 14.307 9 3 500 1 9 4.5 11.820 10 3 500 3 12 3.5 11.228 11 3 500 5 3 2.5 5.192 12 3 500 7 6 1.5 8.538 13 4 500 1 12 2.5 5.620 14 4 500 3 9 1.5 12.421 15 4 500 5 6 4.5 7.346 16 4 500 7 3 3.5 10.343
Table 3. Variance of surface roughness in orthogonal test
View tableView in ArticleTable 3. Variance of surface roughness in orthogonal test
参数 自由度 平方和 均方和 P值 贡献率/% s 3 23.26 7.75 0.837 10.11 f 3 73.02 24.34 0.538 31.73 dc 3 35.74 11.91 0.745 15.53 p 3 15.78 5.26 0.896 6.86
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Xiao CHEN, Jinyang KE, Zhongdi SHE, Jianguo ZHANG, Jianfeng XU. Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon[J]. Optics and Precision Engineering, 2023, 31(1): 99
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Jun. 25, 2022
Accepted: --
Published Online: Feb. 9, 2023
The Author Email: XU Jianfeng (jfxu@hust.edu.cn)
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