Optics and Precision Engineering, Volume. 31, Issue 1, 99(2023)

Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon

Xiao CHEN1...3, Jinyang KE2, Zhongdi SHE2,3, Jianguo ZHANG2, and Jianfeng XU23,* |Show fewer author(s)
Author Affiliations
  • 1School of Mechanical Engineering, Hubei University of Technology, Wuhan430068, China
  • 2School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan430074, China
  • 3National Innovation Institute of Digital Design and Manufacturing, Wuhan40206, China
  • show less

    To achieve an optimized laser-assisted ultra-precision cutting process for monocrystalline silicon and to explore the surface characteristics of monocrystalline silicon components after cutting, the in-situ laser-assisted single-point diamond cutting process parameters of monocrystalline silicon are optimized by the orthogonal experimental method. Various parameters of monocrystalline silicon are measured and analyzed, such as surface quality and accuracy, residual stress, and optical transmittance. Through the variance analysis of the surface roughness and signal-to-noise ratio analysis of the orthogonal experimental data, the optimized process parameters are obtained as follows: spindle speed=1 500 r/min, feed rate=5 mm/min, cutting depth=3 μm, and laser power=4.5 W. The surface roughness and accuracy PV are 2.74 nm and 0.52 μm, respectively, for the 165 mm monocrystalline silicon aspheric optical lens processed with the above process parameters. After the laser-assisted cutting, there is residual stress of (-1 760.8±362.1) MPa on the monocrystalline silicon. The machined monocrystalline silicon's refractive index is 3.43, and the transmittance before and after the coating is 55% and 98%, respectively, in the common 3–5 μm mid-infrared band. The above research results show that laser-assisted ultra-precision machining technology can be used as the semi or final finishing process to improve the manufacturing efficiency of complex surface monocrystalline silicon lenses.

    Tools

    Get Citation

    Copy Citation Text

    Xiao CHEN, Jinyang KE, Zhongdi SHE, Jianguo ZHANG, Jianfeng XU. Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon[J]. Optics and Precision Engineering, 2023, 31(1): 99

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Jun. 25, 2022

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email: XU Jianfeng (jfxu@hust.edu.cn)

    DOI:10.37188/OPE.20233101.0099

    Topics