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Opto-Electronic Engineering, Volume. 49, Issue 6, 210354(2022)

Effect of forming process on microstructures and properties of aluminum oxynitride

Hailong Li1...2, Pan Min1, Zhao Feng1, Hao Xian1,*, Hong Liu1,* and Jingzhong Fang1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Hailong Li, Pan Min, Zhao Feng, Hao Xian, Hong Liu, Jingzhong Fang. Effect of forming process on microstructures and properties of aluminum oxynitride[J]. Opto-Electronic Engineering, 2022, 49(6): 210354

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    Paper Information

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    Received: Nov. 9, 2021

    Accepted: --

    Published Online: Jul. 7, 2022

    The Author Email:

    DOI:10.12086/oee.2022.210354

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology