Opto-Electronic Engineering, Volume. 49, Issue 6, 210354(2022)

Effect of forming process on microstructures and properties of aluminum oxynitride

Hailong Li1...2, Pan Min1, Zhao Feng1, Hao Xian1,*, Hong Liu1,* and Jingzhong Fang1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(11)
    Schematic diagram of spray granulation[18]
    SEM, XRD and particle size distribution results of AlON powder after ball milling
    SEM morphology of spraying granulated powders by different solid content slurries. (a) 30 wt%; (b) 40 wt%; (c) 50 wt%
    Schematic diagrams of drying atomized droplets with different solid contents
    Pictures of formed green body
    SEM results of AlON green body formed by different pressures. (a) 150 MPa; (b) 200 MPa; (c) 260 MPa
    Pore size distribution of green body formed by different pressures
    Transmittance of different forming pressures (thickness 2 mm)
    AlON transparent ceramic plate (a) and dome (b) fabricated by cold isostatic pressing and pressureless sintering
    • Table 1. Green body density of different forming pressures

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      Table 1. Green body density of different forming pressures

      序号成型压力/MPaAlON素坯密度/(g/cm3)
      11501.98±0.03
      22002.17±0.02
      32602.18±0.02
    • Table 2. AlON transparent ceramic density of different forming pressures

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      Table 2. AlON transparent ceramic density of different forming pressures

      序号成型压力/MPaAlON透明陶瓷密度/(g/cm3)
      11503.667±0.006
      22003.676±0.004
      32603.675±0.005
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    Hailong Li, Pan Min, Zhao Feng, Hao Xian, Hong Liu, Jingzhong Fang. Effect of forming process on microstructures and properties of aluminum oxynitride[J]. Opto-Electronic Engineering, 2022, 49(6): 210354

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    Paper Information

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    Received: Nov. 9, 2021

    Accepted: --

    Published Online: Jul. 7, 2022

    The Author Email:

    DOI:10.12086/oee.2022.210354

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