Fig. 1. Wave aberration detection method

Fig. 2. Principle of Twyman-Green interferometer detection lithography objective^[34]

Fig. 3. The principle of Fizeau interferometer detection lithography objective^[35]

Fig. 4. Schematic diagram of the principle of Shack-Hartmann wavefront sensing technology^[38]

Fig. 5. Schematic diagram of the principle of Shack-Hartmann wavefront sensing technology^[39]

Fig. 6. Schematic diagram of transverse shear interferometry^[41]

Fig. 7. ILIAS technology based on Ronchi shear interference principle^[42]

Fig. 8. Phase-shifted point diffraction interferometer structure^[45]

Fig. 9. i-PMI technology based on the principle of line diffraction interference^[7]

Fig. 10. Absolute detection method

Fig. 11. Schematic diagram of classic three-plane combination measurement^[49]

Fig. 12. Schematic diagram of absolute detection of double spheres based on three positions^[52]

Fig. 13. Schematic diagram of rotation and translation method^[60]

Fig. 14. Schematic diagram of the principle of rotating average method^[70]

Fig. 15. Schematic diagram of the principle of random ball method^[72]

Fig. 16. Wavefront aberration of lithography objective absolute detection technology

Fig. 17. Schematic diagram of Fizeau interferometer measurement^[73]

Fig. 18. Schematic diagram of translation and subtraction^[73]

Fig. 19. Cat’s-eye test configuration of spherical interferometer^[74]

Fig. 20. Wavefront aberration measurement of the objective lens using a plane mirror^[75]. (a) Without tilt; (b) With tilt angle ∆θ.

Fig. 21. Schematic diagram of absolute detection principle based on random sphere method^[76]

Fig. 22. Principle of self-calibration of Shack-Hartmann wavefront measurement^[78]

Fig. 23. Classical structure of grating transverse shearing interferometer^[80]

Fig. 24. Schematic diagram of Talbot order method^[93]

Fig. 25. Schematic diagram of system error calibration by Talbot number method^[93]

Fig. 26. Schematic diagram of calibration mask method^[93]

Fig. 27. Experimental results of three calibration methods^[93]

Fig. 28. Absolute detection based on spot diffraction^[94]

Fig. 29. System error calibration of PS/PDI detection by rotating grating method^[95]

Fig. 30. Absolute detection based on optical fiber point diffraction measurement technology^[99]