Acta Photonica Sinica, Volume. 50, Issue 11, 1131001(2021)

Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure

Liangsheng XIAO1... Runze QI2,3,*, Bo LAI2,3, Qiushi HUANG2,3, Jiali WU2,3, Yue YU2,3 and Zihua XIN1,* |Show fewer author(s)
Author Affiliations
  • 1Department of Physics,Shanghai University,Shanghai 200444,China
  • 2Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China
  • 3MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai 200092,China
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    References(42)

    [23] Zhanshan WANG. Effect of film thickness errors on performance of soft X-ray multilayer. Optics and Precision Engineering, 11, 136-138(2003).

    [24] Fengli WANG, Zhanshan WANG, Zhong ZHANG et al. Study on W/B4C, W/C, W/Si multilayers. Optics and Precision Engineering, 13, 28-33(2005).

    [28] Maojin DONG, Tao CHEN, Jizhou WANG et al. Effect of vacuum degree on optical and structural properties of TiO2 thin films. Vacuum and Low Temperature, 16, 233-237(2010).

    [37] Yonggang WU, Erhua CAO, Zhanshan WANG et al. Preparation and characterization of free-standing molybdenum filter for X-ray laser. Optical Instruments, 23, 144-148(2001).

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    Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001

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    Paper Information

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    Received: Apr. 14, 2021

    Accepted: Jun. 7, 2021

    Published Online: Dec. 2, 2021

    The Author Email: QI Runze (qrz@tongji.edu.cn), XIN Zihua (zhxin@shu.edu.cn)

    DOI:10.3788/gzxb20215011.1131001

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